| 摘要 |
PURPOSE:To obtain a high-quality image small in defect by irradiating a substrate with ultraviolet rays of <=300nm wavelength before forming a photosensitive layer. CONSTITUTION:The substrate 1 is cleaned of organic matter, such as cutting oil, by irradiating the substrate 1 with ultraviolet rays 3 of <=300nm, generating ozone (O3) on contacting with oxygen, and further producing active oxygen when ozone is irradiated by ultraviolet rays, and decomposing and gasifying said organic matter before forming the photosensitive layer on the substrate 1, thus permitting good-quality images and good operational environment easy in operational management to be obtained. |
