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发明名称
PLASMA REACTION APPARATUS
摘要
申请公布号
JPH01130530(A)
申请公布日期
1989.05.23
申请号
JP19870291328
申请日期
1987.11.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
FUJIWARA NOBUO
分类号
H01L21/205;H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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