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发明名称
TEST CIRCUIT FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11202031(A)
申请公布日期
1999.07.30
申请号
JP19980020312
申请日期
1998.01.16
申请人
NEC CORP
发明人
HIRATA MASARU
分类号
G01R31/26;G01R31/28;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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