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发明名称
PLASMA TREATMENT DEVICE
摘要
申请公布号
JPH01127686(A)
申请公布日期
1989.05.19
申请号
JP19870284522
申请日期
1987.11.11
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KODERA KOICHI;AKIYAMA TETSUYA
分类号
C23C16/50;C23C16/511;C23F4/00
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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