| 摘要 |
PURPOSE:To obtain the novel releasing agent for a resist instead of a chlorine type solvent by incorporating trichlorodifluoroethane in the releasing agent as an effective component. CONSTITUTION:Said releasing agent contains the trichlorodifluoroethane as the effective component. The trichlorodifluoroethane is incombustibility and has the excellent releasing power for the resist, and is the excellent solvent having a less adverse influence against the materials of a printed board and a semiconductor. The three kinds of the isomers in said trichlorodifluoroethane are known. Said isomers are used independently or in a mixture thereof. Another various kinds of components may be incorporated in the releasing agent according to a purpose. For example, in order to improve the releasing power against the resist, at least one kind of org. solvents selected among hydrocarbons, alcohols, ketones, chlorinated hydrocarbons, aromatics or esters, etc. is incorporated in the releasing agent. Thus, the releasing effect to the resist is improved, and the adverse influence against the plastics, etc., is lessened in comparison with a chlorine type releasing agent. |
