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发明名称
INSPECTION
摘要
申请公布号
JPH01125840(A)
申请公布日期
1989.05.18
申请号
JP19870284007
申请日期
1987.11.10
申请人
TOKYO ELECTRON LTD
发明人
ABE YUICHI;KARASAWA WATARU
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
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