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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01125960(A)
申请公布日期
1989.05.18
申请号
JP19870285978
申请日期
1987.11.11
申请人
FUJITSU LTD
发明人
YOSHIKAWA MASAHIRO;TSUJIMURA TAKEHISA
分类号
H01L23/02;H01L23/04;H01L23/12;H01L23/50
主分类号
H01L23/02
代理机构
代理人
主权项
地址
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