| 摘要 |
PURPOSE:To make it possible to implement a low cost and high sensitivity, by providing a fixing member, whose end part is fixed, in the recess part of a cylinder, which receives moment from the pressure of fluid, fixing electrodes, forming electrostatic capacitances, and detecting the change in said electrostatic capacitance. CONSTITUTION:A recess part 24 is provided in a cylinder 6. Insulating ceramics 21 is fused and attached to the inner wall. Vibration caused by pressure, which is applied to a pressure receiving plate 6a, is transmitted. A cylindrical moving electrode 22 is fixed to the inner surface of the ceramics 21. Lead wires 25 are fused and attached to the end parts. A member 30 is composed of an insulating tube 31, in which a hollow axis 34 is provided, fixed electrodes 32a and 32b, which are fixed to the surface of the tube 31, and lead wires 33a and 33b thereof. A side 37 facing a stream and a rear surface side 36 are removed. Thus the fixed electrodes are divided into two parts. The member 30 is fixed 35 as a coaxial state with the recess part 24. When, the cylinder 6 is deviated by the fluctuation in vortex pressure, which is acted on the pressure receiving plate 6a with a flange 11 as a supporting point, a pair of electrostatic capacitances formed by the electrode 22 and the electrodes 32a and 32b, which form a unitary body, are fluctuated in proportion to the fluctuation in vortex. The fluctuation is converted into a voltage value. |
