发明名称 |
Surface treatment method and apparatus thereof |
摘要 |
Treatment baths for surface treatment of semiconductor wafers by dipping thereof into a treatment liquid are arranged in a treatment bath train. One or more selected treatment baths among these treatment baths are constructed to have a plurality of unit treatment vessels. The treatment liquid in these treatment vessels is replaced successively one by one of the unit treatment vessels. The semiconductor wafers are dipped in the treatment liquid contained in that unit treatment vessel that is not being subjected at that moment to the replacement of the treatment liquid.
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申请公布号 |
US4830888(A) |
申请公布日期 |
1989.05.16 |
申请号 |
US19860906404 |
申请日期 |
1986.09.09 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
KOBAYASHI, ATSUO;YAMADA, TAKUMA;AKAO, KIYOSHI |
分类号 |
H01L21/306;B05D1/18;H01L21/00;H01L21/304;H01L21/67;H01L21/677 |
主分类号 |
H01L21/306 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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