| 摘要 |
PURPOSE:To provide a space-saving position detecting device which can carry out orientation flat detection and centering at the same time with accuracy, by providing a pair of guide rollers symmetrically against the axis of a band base and by providing a movable positioning stopper on the axis. CONSTITUTION:A position detecting device which carries out orientation flat detection and centering of a wafer at the same time is composed of a pair of guide rollers 9 provided respectively at the position symmetrical against an axis l of a band base 1, and a positioning stopper 6 provided at a position on the axis l so that it can move along the axis. A wafer 3 is held between a pair of guide rollers 9 and the positioning stopper 6 is pressed to the orientation flat surface 32 to rotated the wafer 3 until the orientation flat surface 32 comes into contact with the stopper 6. In this way, high-precision orientation flat detection and centering of the wafer 3 can be carried out at the same time and yet saving of the space for installation is realized.
|
