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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01119019(A)
申请公布日期
1989.05.11
申请号
JP19870274723
申请日期
1987.10.31
申请人
NEC CORP
发明人
MUKOHARA HIROAKI
分类号
H01L21/318;H01L21/28;H01L21/283;H01L21/316;H01L21/3213
主分类号
H01L21/318
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代理人
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