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发明名称
INSPECTING APPARATUS OF EXTERNAL APPEARANCE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01119744(A)
申请公布日期
1989.05.11
申请号
JP19870278526
申请日期
1987.11.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITO TSUMIO
分类号
G01N21/88;G01N21/84;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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