| 摘要 |
PURPOSE:To manufacture a thin functional ceramics film by simple equipment by forming an aqueous or organic-solvent solution of inorganometallic salts and organometallic salts, dispersing the above solution into fine drops in a heating atmosphere to carry out thermal decomposition, and the depositing the above on a substrate. CONSTITUTION:One or >=two kinds among inorganometallic salts and/or organometallic salts soluble in water or organic solvents (alcohol, acetone, etc.) are dissolved in water or organic solvents. Further, the metallic elements include the elements located on the left side of a line connecting B and At in a long period-type periodic table, excluding hydrogen, and also include the various elements located on the line connecting B and At. Subsequently, the resulting solution is dispersed into fine drops in a heating atmosphere and deposited, in the course of or directly after the thermal decomposition of solutes, on a substrate. By this method, the thin functional ceramics film can be obtained by simple equipment at a low running costs. |
