ELECTRIC CHARACTERISTIC MEASUREMENT FOR SEMICONDUCTOR DEVICE,申请号JP19870275169-传众专利搜索

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发明名称	ELECTRIC CHARACTERISTIC MEASUREMENT FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01116461(A)	申请公布日期	1989.05.09
申请号	JP19870275169	申请日期	1987.10.29
申请人	NEC YAMAGATA LTD	发明人	SUZUKI MASASHI
分类号	H01L21/66;G01R31/02;G01R31/26	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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