| 摘要 |
PURPOSE:To stabilize wavelength and reduce variation of laser output by controlling one of two plates of an etalon on the basis of the result of spectroscopic analysis of laser beam and controlling the other plates based on a laser power. CONSTITUTION:A part of laser beam 6 irradiated from a laser oscillator which can vary oscillation wavelength is extracted using a first Fabry-Perot etalon 4 and a second Fabry-Perot etalon 5, and it is then analyzed spectrometrically with a wavelength monitor mechanism 7 to determine oscillation wavelength. The first Fabry-Perot etalon 4 is controlled according to the oscillation wavelength to stabilize the wavelength of laser oscillator. Next, a part of laser beam 6 is extracted, its laser output is measured with a power monitor mechanism 9 to control the second Fabry-Perot etalon 5 and stabilize an output of laser oscillator. Thereby, wavelength can be stabilized and reduction of laser output can be suppressed. |
