| 摘要 |
<p>A three-dimensional shape measurement apparatus uses a laser beam(2) to illuminate an object(14). The light reflected from the object is processed to obtain information about the shape of the object in three dimensions. As the beam moves over contour features of the object, there is a corresponding displacement of the focal point of the light reflected back from the object which is calculated to convert it to depth-wise shape information. The apparatus includes a laser light source(1); deflectors(6,17) for scanning the laser beam at a set frequency; an optical system (19) for projecting the laser beam scanned by the optical deflectors at the object; detection slits(22,27) arranged parallel to the direction in which the reflected light is scanned on an optical axis that is perpendicular to the direction of the scanning by the optical deflectors, the slits being placed a certain distance from a point that is optically conjugate with the object; photosensors(24,30) for detecting light passing through the detection slits; and a signal processor (39) to eliminate the effect of the reflection characteristics of the object.</p> |
