| 摘要 |
A turbo-molecular vacuum pump has a high vacuum side and a fore vacuum side in the form of a molecular pump in which the rotor and stator are frusto-conically shaped. The frusto-conically shaped rotor surface has a helical groove. An axial bearing for the rotor is located at an imaginary apex point of the conically-shaped surface of the rotor. The surface of the bearing containing the imaginary apex point is stationary relative to the stator. The rotor and stator are formed of a high heat conductivity material.
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