| 摘要 |
PURPOSE:To obtain an IR image pickup device having high sensitivity and decreased crosstalks by supporting the pyroelectric elements formed by each of photodetecting elements to projecting parts made of low thermal conductivity material provided on CCD. CONSTITUTION:The thin pyroelectric films 14 of a PbTiO3 system separated by each of the respective photodetecting elements are separated by each of the phototecting elements and are formed on the (100) face of an MgO single crystal substrate which is not shown. Thin org. films 15, electrodes 16, and thin org. films 17 on the electrodes 16 are formed thereon. The projecting parts 19 made of org. films are formed on the CCD 18 and electrodes 20 are formed thereon. The In bumps formed on the electrodes 20 in the parts on the projecting parts 19 and the In bumps formed on the electrodes 16 in the prescribed parts on the tin org. films 15 are joined by thermocompression bonding. After the MgO substrate is removed by hot phosphoric acid, photodetecting electrodes 21 are formed. Since the pyroelectric elements are formed discretely from the CCDs, the high-performance pyroelectric elements are formable by a sputtering method, etc. Since the spacings between the pyroelectric bodies and the CCD are hollowed, the heat conduction is decreased and the sensitivity is enhanced. The crosstalks are decreased by the element-by-element sepn. |
