GAS SUPPLY SYSTEM WITH BAKING FUNCTION

摘要

PURPOSE:To efficiently bake a gas supply system with good reproducibility by constituting the gas supply system in a box having a heat insulating structure and adding a baking function of a hot air circulation system thereto. CONSTITUTION:The heat generated by a heater 13 is forcibly stirred by a fan constituted of a motor 14 and a propeller 15, by which the temp. in the box is elevated. The electric power of a heater 13 is controlled by a temp. sensor 11, a temp. controller 9 and a power controller 12 to elevate the temp. in the box up to a set temp. and to maintain a uniform temp. distribution. The gas generated from the outside of the unit and the dust generated by the circulation of the hot air at the time of baking are reduced in pressure and are discharged from a discharge port 17 to the outside of the clean room. The baking temp. is thereby arbitrarily set and the uniform temp. distribution is maintained. The gas supply system which is required to be periodically baked is thus efficiently baked with the good reproducibility.