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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH01108725(A)
申请公布日期
1989.04.26
申请号
JP19870266768
申请日期
1987.10.21
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
NISHIMURA HIROSHI;YANO KOSAKU;UEDA TETSUYA;TANIMURA SHOICHI;SAWADA KAZUYUKI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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