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发明名称
BONDING DEVICE
摘要
申请公布号
JPH01109728(A)
申请公布日期
1989.04.26
申请号
JP19870266435
申请日期
1987.10.23
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
KANEKO FUJIKATSU;YAZAKI NORIHIRO;IWASAKI SEIICHI;FURUHASHI TAKAHIRO
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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