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发明名称
MEASUREMENT OF FINE SHAPE
摘要
申请公布号
JPH01110206(A)
申请公布日期
1989.04.26
申请号
JP19870266366
申请日期
1987.10.23
申请人
HITACHI LTD
发明人
KURE TOKUO;KOMODA TSUTOMU;KURODA KATSUHIRO;KIMURA SHIGEJI
分类号
G01B15/00
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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