| 摘要 |
A method for self-grinding a chuck table is provided to prevent metal from penetrating the absorption surface of a chuck table in a self-grinding process by using a grinding whetstone with no metal such that the whetstone is made of a bond agent except a metal bond. While a chuck table(2) and a grinding wheel(33) are rotated, a grinding unit approaches the chuck table by a driving unit to make a grinding whetstone(33b) comes in contact with the absorption surface(20) of the chuck table so that the absorption surface is ground. When a self-grinding process is performed to parallel the absorption surface with the grinding surface of the grinding whetstone, a grinding whetstone made of a bond agent except a metal bond is used. The chuck table can be ground while water is gushing out from the absorption surface of the chuck table.
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