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发明名称
SEMICONDUCTOR MANUFACTURING EQUIPMENT AND STARTING METHOD THEREOF
摘要
申请公布号
JPH01106432(A)
申请公布日期
1989.04.24
申请号
JP19870264110
申请日期
1987.10.20
申请人
FUJITSU LTD
发明人
NAKAMURA MORITAKA
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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