| 摘要 |
PURPOSE:To remove an incorrect peak by fixing the electron beam radiation point, periodically changing the electron beam incident angle, and detecting characteristic X-rays emitted from a sample. CONSTITUTION:The deflection angles of deflecting coils 4a and 4b are set by a scanning section 15 in the relationship that the deflection angle by the deflecting coil 4a is theta and the deflection angle by the deflecting coil 4b is-2theta. An electron beam passes the same position on the optical axis for any theta, and a sample 5 is arranged at this position. The scanning section 15 repeatedly scans in the range of -3<=theta<=3 deg., for example, the electron beam incoming to the sample is repeatedly scanned to oscillate the incident angle in the range of + or -t3 deg. centering the electron beam radiation point on the sample. Incorrect X-rays are thereby generated only at the moment when the incident angle becomes the specific value, and the peak due to incorrect X-rays is almost suppressed. |
