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发明名称
VAPOR GROWTH METHOD FOR COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH01103996(A)
申请公布日期
1989.04.21
申请号
JP19870260830
申请日期
1987.10.16
申请人
NEC CORP
发明人
SASAOKA CHIAKI;MORI KAZUO
分类号
C30B23/08;C30B29/40;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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