| 摘要 |
PURPOSE: To improve sensitivity when changing distance to an optical energy and further an electrical quantity by coating a sensor with a continuous thin film in a condition so that a detection small piece is coated. CONSTITUTION: A sensor body is formed as a light waveguide of a laser beam 2 and has a light entrance side 3, an exit side 4 for light to be guided through a body 1, and a light exit side 10 for light to be diffracted within the body 1. A detection small piece 15 is arranged on a surface 5 of the body 1 between the entrance side 3 and the exit side 4 and operates as an antenna and is coated with a continuous thin film 16. Then, a surface 17 of a body M to be measured is measured by a measurement side 18, the gap of distance prescribed in reference to a reference side 14 is converted to the quantity of optical energy, and the quantity is converted to an electrical quantity by a detector means 11. Since the small piece 15 is coated with the thin metal film 16, incidence light can be properly separated from scattered light, thus improving antenna effect. |
