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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01101678(A)
申请公布日期
1989.04.19
申请号
JP19870260385
申请日期
1987.10.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
ECCHU MASAO
分类号
H01L21/314;H01L21/28;H01L21/283;H01L29/43;H01L39/06;H01L39/24
主分类号
H01L21/314
代理机构
代理人
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