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发明名称
MANUFACTURE OF PRESSURE CONTACT TYPE SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0198233(A)
申请公布日期
1989.04.17
申请号
JP19880120901
申请日期
1988.05.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
ODATE MITSUO
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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