发明名称 FINE ADJUSTMENT ROTARY JIG FOR SETTING CUTTING POINT
摘要 <p>PURPOSE:To facilitate the setting of a cutting point by mounting a fine adjustment rotary jig for setting a cutting point on a diamond cutter. CONSTITUTION:A fine adjustment rotary jig 1 is formed of a cylindrical body 3 which has a hole 2, to which a diamond cutter 6 is inserted, at the center, and a fine adjustment rotary jig clamping screw 4 is engaged. The cutter 6 is mounted on the end of the arm 7 of a scriber, the cutter end 8 and a wafer stage 9 are determined in height, and temporarily clamped by a stationary screw 10. The cutter 6 is inserted until the jig 1 is contacted with the upper surface of the arm 7, and fixed by the screw 4 to the cutter 6. Then, the wafer 11 is trially cut to judge the cutting state, and the cutter 6 is finely rotated by a projection 5 to trially cut if improper. When the cutting point is determined, the screw 10 is clamped to secure the cutter 6.</p>
申请公布号 JPS5919353(A) 申请公布日期 1984.01.31
申请号 JP19820127551 申请日期 1982.07.23
申请人 HITACHI SEISAKUSHO KK 发明人 TSUCHIDA YOSHICHI
分类号 H01L21/301;H01L21/78;(IPC1-7):01L21/78 主分类号 H01L21/301
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