| 摘要 |
PURPOSE:To stabilize a laser beam by constituting all insulating part materials inside a housing by using an inorganic material. CONSTITUTION:An insulating sheet 13a, gas guides 10a, 11a, an electrode stand 15a and the like inside a housing 1 are all constituted by using an insulating part material of an inorganic material such as a ceramic, heat-resisting glass and the like. Accordingly, they are not deteriorated at all by a laser medium gas of a mixed gas composed of CO2, Co, He and Ne; a microscopic particle is not produced; the inside of the housing 1 is always kept in a clean state; the vacuum side, i.e the inner side, of a partial reflector 6 and a total reflector 7 is not contaminated. By this setup, a stable laser beam can be obtained. |
