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发明名称
Pulsed plasma apparatus
摘要
申请公布号
GB2208656(A)
申请公布日期
1989.04.12
申请号
GB19880016725
申请日期
1986.06.27
申请人
* STC PLC
发明人
RUDOLF AUGUST HERBERT * HEINECKE;SURESHCHANDRA MISHRILAL * OJHA;IAN PAUL * LLEWELLYN
分类号
C23C16/515;H01J37/32
主分类号
C23C16/515
代理机构
代理人
主权项
地址
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