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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0193154(A)
申请公布日期
1989.04.12
申请号
JP19870250883
申请日期
1987.10.05
申请人
TOSHIBA CORP
发明人
ENDO TAKAYUKI;EZAWA HIROKAZU
分类号
H01L21/60;H01L21/288
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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