摘要 |
PURPOSE:To form a ceramic-type high-temp. superconducting film on a substrate by spraying a pulverized powder of Y-Ba-Cu-O-type ceramics on the surface of a ceramic substrate by means of a high-pressure inert gas. CONSTITUTION:An inert gas of Ar, etc., of 100-500atm. is blown from a gas bomb 1 by means of a conduit 2 into a powdery raw material 5 for superconducting film formation in a vessel 4. As the powdery raw material for superconducting film formation, a pulverized powder of Y-Ba-Cu-O-type ceramics with 0.1-0.5mum grain size in used. (In the above expression, Y means Y, Sc, and lanthanoid elements of the group IIIa of the periodic table and Ba means Ba, Sr, Ca, Mg, etc., of the group IIa). When the pulverized powder of ceramics of the above composition is sprayed from the end of a nozzle 6 on a ceramic substrate 7 of Al2O3, etc., the pulverized powder of raw material is melted by means of the impact force, by which the ceramic-type high-temp. superconducting film 8 having a composition, e.g., of YBa2Cu3Ox can be formed on the substrate 7. |