| 摘要 |
PURPOSE:To decrease an amount of deformation of a disk-like component under a heat treatment and lengthen the span of its life by a method wherein the disk-like component constituting a base plate of a boat is made 10mm or more in thickness. CONSTITUTION:A boat is structured in such a manner that disk-like components 1 and 3 are fixed to both ends of plural supporting materials (struts) 2 respectively, which constitute a top plate 11 and a base plate 12 each, and a required number of grooves 6 are provided to prescribed parts between the ends of the struts 2, where the grooves are utilized for holding wafers 4. The disk-like component 3 of the base plate 12 is made 10mm or more in thickness. By these processes, a base plate can be decreased in an amount of deformation, so that a boat is made to lengthen its life. |
