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经营范围
发明名称
CVD SYSTEM
摘要
申请公布号
JPS6490521(A)
申请公布日期
1989.04.07
申请号
JP19870248573
申请日期
1987.09.30
申请人
DAIWA HANDOTAI SOCHI KK
发明人
TAKAHASHI ICHIRO
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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