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发明名称
FORMATION OF GAAS EPITAXIAL LAYER
摘要
申请公布号
JPS6490518(A)
申请公布日期
1989.04.07
申请号
JP19870248433
申请日期
1987.10.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
KATO MARI
分类号
H01L21/20;H01L21/324
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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