MICROSCOPE APPARATUS FOR EXAMINING WAFER,申请号EP19860101375-传众专利搜索

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发明名称	MICROSCOPE APPARATUS FOR EXAMINING WAFER
摘要
申请公布号	EP0193001(B1)	申请公布日期	1989.04.05
申请号	EP19860101375	申请日期	1986.02.03
申请人	OLYMPUS OPTICAL CO., LTD.	发明人	YOSHINAGA, MAKOTO;IBA, YOICHI;MIYAHARA, NORIYUKI;KAWASAKI, MASAMI;MORITA, TERUMASA;NAGANO, TAKASHI
分类号	G02B21/00;G02B21/24;(IPC1-7):G02B21/00;H05K13/02;G03B41/00	主分类号	G02B21/00
代理机构		代理人
主权项
地址

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