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发明名称
WIRING METHOD OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6489445(A)
申请公布日期
1989.04.03
申请号
JP19870246084
申请日期
1987.09.30
申请人
TOSHIBA CORP
发明人
KURIBAYASHI MOTOTAKA
分类号
H01L21/82;G06F17/50;H01L21/822;H01L27/04
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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