| 摘要 |
PURPOSE:To prevent production of glass powder by polishing the end face of the inner and outer circumferences of a glass substrate to the surface coarseness to be >=5mum. CONSTITUTION:Minute ruggedness of the end face is removed by using a grinder with lower grinding particles so as to polish the end faces 11, 12 after they are processed circularly once. Since the coarseness of the end face of the base gives a large effect onto the manufacture yield, it is required to reduce the coarseness of the base end face and the coarseness is selected to be >=5mum. Thus, the generation of glass powder is less and the yield in the manufacture process is improved, and the cost reduction is attained finally. |
