发明名称 |
LASER BEAM TRIMMING DEVICE |
摘要 |
PURPOSE:To execute the working of high accuracy by transmitting a laser light through an optional zone by a variable rectangular slit as well as varying in a extremely short time the strength of a 2nd laser light to be projected next by comparing with the strength of a 1st laser light. CONSTITUTION:The laser light passing a variable slit 7 to the work position of the body 10 to be worked is transmitted in the laser projection range 11 of the work objective body 10. At this time, if necessary, a light reducing means 5 is used to control the power on each laser pulse. In this case, the transmission amt. is controlled by the time of <=50mm. With such composition the working accuracy can be improved. |
申请公布号 |
JPS6487089(A) |
申请公布日期 |
1989.03.31 |
申请号 |
JP19870243307 |
申请日期 |
1987.09.28 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
TAKAHARA HIROSHI;NODA HITOSHI |
分类号 |
G02B26/02;B23K26/00;B23K26/06;H01C17/24;H01C17/242;H01L21/3205;H01L21/82;H01L29/786 |
主分类号 |
G02B26/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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