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发明名称
PROBING CARD
摘要
申请公布号
JPS6484729(A)
申请公布日期
1989.03.30
申请号
JP19870242990
申请日期
1987.09.28
申请人
TOKYO ELECTRON LTD
发明人
MASUOKA NOBORU
分类号
H01L21/66;G01R1/073
主分类号
H01L21/66
代理机构
代理人
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地址
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