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发明名称
AUTOMATIC MICRO-POSITIONING METHOD AND DEVICE
摘要
申请公布号
JPS6486210(A)
申请公布日期
1989.03.30
申请号
JP19870243219
申请日期
1987.09.28
申请人
YASKAWA ELECTRIC MFG CO LTD
发明人
NAGASE TAKASHI
分类号
G05D3/00;G05D3/12
主分类号
G05D3/00
代理机构
代理人
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