Process for liquid-phase epitaxy

摘要

In a process for liquid-phase epitaxy in which a melt is brought into contact with the substrate to be provided with an epitaxial layer, the melt is forced into a narrowing space formed by a perforated substrate holder and a ramp extending obliquely to this substrate holder, or between a perforated substrate holder and the ramp in such a way that the melt penetrates through the perforations of the substrate holder and covers the substrate.