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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6484719(A)
申请公布日期
1989.03.30
申请号
JP19870243381
申请日期
1987.09.28
申请人
MATSUSHITA ELECTRON CORP
发明人
YAMANISHI YUJI
分类号
H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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