| 摘要 |
PURPOSE:To prevent an electrophotographic sensitive body from generation of flow of picture image in a printed figure or character, etc., by laminating a surface layer having unevenness and comprising amorphous carbon contg. at least one of halogen and hydrogen on a photosensitive layer of a-Si:H photosensitive body. CONSTITUTION:Generation of flow of a picture image is prevented by retarding oxidation of surface of a photosensitive layer since the generation of flow of a picture image is considered to be caused by the increase of adsorbed water due to oxidation of surface of the photosensitive layer. For this purpose, a surface layer 302 comprising amorphous carbon film contg. at least one of halogen and hydrogen is formed on the photosensitive layer 101, and unevennesses are formed on the free surface 301 of the surface layer. Namely, after forming the photosensitive layer 101 by plasma CVD process, sputtering process, ion plating process, etc., feed gas contg. a halogen compd. is decomposed by high frequency glow discharge, wherein the pressure of the gas is reduced in the midway of the glow discharge. By this method, unevennesses are formed on the free surface of the surface layer simultaneously with the formation of the surface layer 302. Thus, generation of flow of a picture image in a printed figure or character, etc., is prevented. |
