VACUUM DEPOSITION DEVICE,申请号JP19870240188-传众专利搜索

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发明名称	VACUUM DEPOSITION DEVICE
摘要
申请公布号	JPS6483657(A)	申请公布日期	1989.03.29
申请号	JP19870240188	申请日期	1987.09.24
申请人	SHIMADZU CORP	发明人	SHINOHARA MAKOTO;OTANI FUMIHIKO;TAKAGI TOSHINORI
分类号	C23C14/54;C23C14/32	主分类号	C23C14/54
代理机构		代理人
主权项
地址

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