VACUUM FILM FORMATION,申请号JP19870238620-传众专利搜索

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发明名称	VACUUM FILM FORMATION
摘要
申请公布号	JPS6483660(A)	申请公布日期	1989.03.29
申请号	JP19870238620	申请日期	1987.09.25
申请人	TDK CORP	发明人	IKEHATA ETSURO;MAEDA TOMOAKI;ONODERA AKIRA
分类号	C23C14/50	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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