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发明名称
HEAT TREATMENT
摘要
申请公布号
JPS6482619(A)
申请公布日期
1989.03.28
申请号
JP19870242137
申请日期
1987.09.25
申请人
NEC CORP
发明人
MATSUMOTO YOSHINARI
分类号
H01L21/324;H01L21/265
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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