MANUFACTURE OF SUPERCONDUCTING THIN FILM

摘要

PURPOSE:To enable the formation of a superconducting thin film via a low temperature process by applying heat treatment thereto within a specific temperature range under an ozone current. CONSTITUTION:Heat treatment at a temperature equal to or lower than 800 deg.C under an ozone current makes it possible to oxidize even the inside of a fine complex oxide thin film due to the strong oxidizing power of ozone. Consequently, it is possible to make the complex oxide thin film of a Y-Ba-Cu-O system needing high temperature treatment at 900 deg.C or above into a superconducting thin film having a rhombic structure via a low temperature process.